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Plasma electronics : applications in microelectronic device fabrication / Toshiaki Makabe, Zoran Lj. Petrovic.

By: Makabe, T. (Toshiaki) [author.].
Contributor(s): Petrovic, Z [author.].
Material type: materialTypeLabelBookPublisher: Boca Raton : CRC Press, [2015]Copyright date: ©2015Edition: Second edition.Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9781482222104.Subject(s): Plasma engineeringAdditional physical formats: Print version: : No titleDDC classification: 621.044 Online resources: Click here to view.
Contents:
chapter 1. Introduction -- chapter 2. Phenomenological description of the charged particle transport -- chapter 3. Macroscopic plasma characteristics -- chapter 4. Elementary processes in gas phase and on surfaces -- chapter 5. The Boltzmann equation and transport equations of charged particles -- chapter 6. General properties of charged particle transport in gases -- chapter 7. Modeling of nonequilibrium (low temperature) plasmas -- chapter 8. Numerical procedure of modeling -- chapter 9. Capacitively coupled plasma -- chapter 10. Inductively coupled plasma -- chapter 11. Magnetically enhanced plasma -- chapter 12. Plasma processing and related topics -- chapter 13. Atmospheric-pressure, low-temperature plasma.
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chapter 1. Introduction -- chapter 2. Phenomenological description of the charged particle transport -- chapter 3. Macroscopic plasma characteristics -- chapter 4. Elementary processes in gas phase and on surfaces -- chapter 5. The Boltzmann equation and transport equations of charged particles -- chapter 6. General properties of charged particle transport in gases -- chapter 7. Modeling of nonequilibrium (low temperature) plasmas -- chapter 8. Numerical procedure of modeling -- chapter 9. Capacitively coupled plasma -- chapter 10. Inductively coupled plasma -- chapter 11. Magnetically enhanced plasma -- chapter 12. Plasma processing and related topics -- chapter 13. Atmospheric-pressure, low-temperature plasma.

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