Makabe, T.
Plasma electronics : applications in microelectronic device fabrication / Toshiaki Makabe, Zoran Lj. Petrovic. - Second edition. - 1 online resource
chapter 1. Introduction -- chapter 2. Phenomenological description of the charged particle transport -- chapter 3. Macroscopic plasma characteristics -- chapter 4. Elementary processes in gas phase and on surfaces -- chapter 5. The Boltzmann equation and transport equations of charged particles -- chapter 6. General properties of charged particle transport in gases -- chapter 7. Modeling of nonequilibrium (low temperature) plasmas -- chapter 8. Numerical procedure of modeling -- chapter 9. Capacitively coupled plasma -- chapter 10. Inductively coupled plasma -- chapter 11. Magnetically enhanced plasma -- chapter 12. Plasma processing and related topics -- chapter 13. Atmospheric-pressure, low-temperature plasma.
9781482222104
10.1201/b17322 doi
Plasma engineering.
TA2020 / .M35 2015
621.044 / M235
Plasma electronics : applications in microelectronic device fabrication / Toshiaki Makabe, Zoran Lj. Petrovic. - Second edition. - 1 online resource
chapter 1. Introduction -- chapter 2. Phenomenological description of the charged particle transport -- chapter 3. Macroscopic plasma characteristics -- chapter 4. Elementary processes in gas phase and on surfaces -- chapter 5. The Boltzmann equation and transport equations of charged particles -- chapter 6. General properties of charged particle transport in gases -- chapter 7. Modeling of nonequilibrium (low temperature) plasmas -- chapter 8. Numerical procedure of modeling -- chapter 9. Capacitively coupled plasma -- chapter 10. Inductively coupled plasma -- chapter 11. Magnetically enhanced plasma -- chapter 12. Plasma processing and related topics -- chapter 13. Atmospheric-pressure, low-temperature plasma.
9781482222104
10.1201/b17322 doi
Plasma engineering.
TA2020 / .M35 2015
621.044 / M235