| 000 | 00492 a2200193 4500 | ||
|---|---|---|---|
| 999 |
_c98142 _d98142 |
||
| 005 | 20250327161748.0 | ||
| 008 | 250327b ||||| |||| 00| 0 eng d | ||
| 020 | _a9781475774580 | ||
| 082 | _a621.381 S28M | ||
| 100 |
_aSenturia, Stephen D. _9179515 |
||
| 245 | _aMicrosystem Design | ||
| 260 |
_bSpringer _aNew York _c2001 |
||
| 300 | _ap.689 | ||
| 650 |
_aMicrofabrication _927581 |
||
| 650 |
_aElasticity _93355 |
||
| 650 |
_aFluids _947082 |
||
| 650 |
_aNoise _9179516 |
||
| 942 | _cBK | ||