000 | 00360nam a2200145Ia 4500 | ||
---|---|---|---|
008 | 190706s9999 xx 000 0 und d | ||
020 | _a1-4377-7873-1 | ||
082 | _a621.38172 S493 | ||
100 | _aSESHAN,K | ||
245 | 0 | _aHANDBOOK OF THIN FILM DEPOSITION | |
250 | _a3 | ||
260 |
_aLONDON _bElsevier _c2012 |
||
300 | _axviii+392p.,24x16Cms | ||
942 |
_cREF _2DDC |
||
999 |
_c8564 _d8564 |