000			02751nam a2200361 i 4500
001			CR9780511781995
003			UkCbUP
005			20230516164928.0
006			m|||||o||d||||||||
007			cr||||||||||||
008			100519s2010||||enk o ||1 0|eng|d
020			_a9780511781995 (ebook)
020			_z9780521897716 (hardback)
040			_aUkCbUP _beng _erda _cUkCbUP
050	0	0	_aTK7875 _b.L83 2010
082	0	0	_a621.381 _222
100	1		_aLucyszyn, S. _q(Stepan), _eauthor. _968268
245	1	0	_aAdvanced RF MEMS / _cStepan Lucyszyn.
264		1	_aCambridge : _bCambridge University Press, _c2010.
300			_a1 online resource (xxviii, 412 pages) : _bdigital, PDF file(s).
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
490	1		_aThe Cambridge RF and microwave engineering series
500			_aTitle from publisher's bibliographic system (viewed on 05 Oct 2015).
505	0		_aIntroduction S. Lucyszyn -- Electromechanical modelling of electrostatic actuators D. Elata and V. Leus -- Switches and their fabrication technologies T. Lisec -- Niche switch technologies S. Lucyszyn, S. Pranonsatit, J.Y. Choi and A. Holmes -- Reliability I. De Wolf -- Dielectric charging G. Papaioannou -- Stress and thermal characterisation R.Y. Fillit and R. Fortunier -- High power handling F. Coccetti and R. Plana -- Packaging H. Tilmans, A. Jourdain and P. De Moor -- Impedance tuners and tuneable filters A. Pothier and T. Va ; ha ;-Heikkila -- Phase shifters and tunable delay lines L. Dussopt -- Reconfigurable architectures T. Va ;ha ;-Heikkila -- Industry roadmap for RF MEMS J. Bouchaud, R. Sorrentino, B. Knoblich, H. Tilmans and F. Coccetti.
520			_aAn up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation
650		0	_aRadio frequency microelectromechanical systems. _920302
776	0	8	_iPrint version: _z9780521897716
830		0	_aCambridge RF and microwave engineering series. _94525
856	4	0	_uhttps://doi.org/10.1017/CBO9780511781995
942			_cEBK
999			_c82314 _d82314