000			02505nam a2200361 i 4500
001			CR9780511974342
003			UkCbUP
005			20230516164903.0
006			m|||||o||d||||||||
007			cr||||||||||||
008			101011s2011||||enk o ||1 0|eng|d
020			_a9780511974342 (ebook)
020			_z9780521763004 (hardback)
040			_aUkCbUP _beng _erda _cUkCbUP
050	0	0	_aTA2020 _b.C43 2011
082	0	0	_a621.044 _222
100	1		_aChabert, Pascal, _d1969- _eauthor. _967912
245	1	0	_aPhysics of radio-frequency plasmas / _cPascal Chabert, CNRS, Nicholas Braithwaite, The Open University.
264		1	_aCambridge : _bCambridge University Press, _c2011.
300			_a1 online resource (viii, 385 pages) : _bdigital, PDF file(s).
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
500			_aTitle from publisher's bibliographic system (viewed on 05 Oct 2015).
505	8		_aMachine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index.
520			_aLow-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
650		0	_aLow temperature plasmas. _927125
650		0	_aRadio frequency. _99855
700	1		_aBraithwaite, Nicholas _q(Nicholas St. J.), _eauthor. _967913
776	0	8	_iPrint version: _z9780521763004
856	4	0	_uhttps://doi.org/10.1017/CBO9780511974342
942			_cEBK
999			_c82172 _d82172