| 000 | 03522nam a22006015i 4500 | ||
|---|---|---|---|
| 001 | 978-3-319-23853-1 | ||
| 003 | DE-He213 | ||
| 005 | 20220801222558.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 151222s2016 sz | s |||| 0|eng d | ||
| 020 |
_a9783319238531 _9978-3-319-23853-1 |
||
| 024 | 7 |
_a10.1007/978-3-319-23853-1 _2doi |
|
| 050 | 4 | _aTK7875 | |
| 072 | 7 |
_aTJF _2bicssc |
|
| 072 | 7 |
_aTEC027000 _2bisacsh |
|
| 072 | 7 |
_aTJF _2thema |
|
| 082 | 0 | 4 |
_a621.381 _223 |
| 245 | 1 | 0 |
_aNanopositioning Technologies _h[electronic resource] : _bFundamentals and Applications / _cedited by Changhai Ru, Xinyu Liu, Yu Sun. |
| 250 | _a1st ed. 2016. | ||
| 264 | 1 |
_aCham : _bSpringer International Publishing : _bImprint: Springer, _c2016. |
|
| 300 |
_aVI, 409 p. 279 illus., 203 illus. in color. _bonline resource. |
||
| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
||
| 338 |
_aonline resource _bcr _2rdacarrier |
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| 347 |
_atext file _bPDF _2rda |
||
| 505 | 0 | _a1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage. | |
| 520 | _aThis book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries. | ||
| 650 | 0 |
_aMicrotechnology. _928219 |
|
| 650 | 0 |
_aMicroelectromechanical systems. _96063 |
|
| 650 | 0 |
_aElectronics. _93425 |
|
| 650 | 0 |
_aControl engineering. _931970 |
|
| 650 | 0 |
_aRobotics. _92393 |
|
| 650 | 0 |
_aAutomation. _92392 |
|
| 650 | 0 |
_aEngineering design. _93802 |
|
| 650 | 1 | 4 |
_aMicrosystems and MEMS. _962225 |
| 650 | 2 | 4 |
_aElectronics and Microelectronics, Instrumentation. _932249 |
| 650 | 2 | 4 |
_aControl, Robotics, Automation. _931971 |
| 650 | 2 | 4 |
_aEngineering Design. _93802 |
| 700 | 1 |
_aRu, Changhai. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt _962226 |
|
| 700 | 1 |
_aLiu, Xinyu. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt _962227 |
|
| 700 | 1 |
_aSun, Yu. _eeditor. _0(orcid)0000-0001-7895-0741 _1https://orcid.org/0000-0001-7895-0741 _4edt _4http://id.loc.gov/vocabulary/relators/edt _962228 |
|
| 710 | 2 |
_aSpringerLink (Online service) _962229 |
|
| 773 | 0 | _tSpringer Nature eBook | |
| 776 | 0 | 8 |
_iPrinted edition: _z9783319238524 |
| 776 | 0 | 8 |
_iPrinted edition: _z9783319238548 |
| 776 | 0 | 8 |
_iPrinted edition: _z9783319795393 |
| 856 | 4 | 0 | _uhttps://doi.org/10.1007/978-3-319-23853-1 |
| 912 | _aZDB-2-ENG | ||
| 912 | _aZDB-2-SXE | ||
| 942 | _cEBK | ||
| 999 |
_c80926 _d80926 |
||