000 03459nam a22005655i 4500
001 978-3-658-19238-9
003 DE-He213
005 20220801222547.0
007 cr nn 008mamaa
008 170911s2018 gw | s |||| 0|eng d
020 _a9783658192389
_9978-3-658-19238-9
024 7 _a10.1007/978-3-658-19238-9
_2doi
050 4 _aTK7875
072 7 _aTJF
_2bicssc
072 7 _aTEC027000
_2bisacsh
072 7 _aTJF
_2thema
082 0 4 _a621.381
_223
100 1 _aIvanov, Alexey.
_eauthor.
_4aut
_4http://id.loc.gov/vocabulary/relators/aut
_962139
245 1 0 _aSilicon Anodization as a Structuring Technique
_h[electronic resource] :
_bLiterature Review, Modeling and Experiments /
_cby Alexey Ivanov.
250 _a1st ed. 2018.
264 1 _aWiesbaden :
_bSpringer Fachmedien Wiesbaden :
_bImprint: Springer Vieweg,
_c2018.
300 _aXXIX, 316 p. 141 illus., 3 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _aSilicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation.
520 _aAlexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing <The Author Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.
650 0 _aMicrotechnology.
_928219
650 0 _aMicroelectromechanical systems.
_96063
650 0 _aEngineering mathematics.
_93254
650 0 _aEngineering—Data processing.
_931556
650 0 _aThermodynamics.
_93554
650 0 _aHeat engineering.
_95144
650 0 _aHeat transfer.
_932329
650 0 _aMass transfer.
_94272
650 1 4 _aMicrosystems and MEMS.
_962140
650 2 4 _aMathematical and Computational Engineering Applications.
_931559
650 2 4 _aEngineering Thermodynamics, Heat and Mass Transfer.
_932330
710 2 _aSpringerLink (Online service)
_962141
773 0 _tSpringer Nature eBook
776 0 8 _iPrinted edition:
_z9783658192372
776 0 8 _iPrinted edition:
_z9783658192396
856 4 0 _uhttps://doi.org/10.1007/978-3-658-19238-9
912 _aZDB-2-ENG
912 _aZDB-2-SXE
942 _cEBK
999 _c80905
_d80905