000 | 03576nam a22005655i 4500 | ||
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001 | 978-3-030-40560-1 | ||
003 | DE-He213 | ||
005 | 20220801213921.0 | ||
007 | cr nn 008mamaa | ||
008 | 200409s2020 sz | s |||| 0|eng d | ||
020 |
_a9783030405601 _9978-3-030-40560-1 |
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024 | 7 |
_a10.1007/978-3-030-40560-1 _2doi |
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050 | 4 | _aTK7875 | |
072 | 7 |
_aTJF _2bicssc |
|
072 | 7 |
_aTEC027000 _2bisacsh |
|
072 | 7 |
_aTJF _2thema |
|
082 | 0 | 4 |
_a621.381 _223 |
100 | 1 |
_aHuff, Michael. _eauthor. _4aut _4http://id.loc.gov/vocabulary/relators/aut _935196 |
|
245 | 1 | 0 |
_aProcess Variations in Microsystems Manufacturing _h[electronic resource] / _cby Michael Huff. |
250 | _a1st ed. 2020. | ||
264 | 1 |
_aCham : _bSpringer International Publishing : _bImprint: Springer, _c2020. |
|
300 |
_aXIX, 521 p. 236 illus., 24 illus. in color. _bonline resource. |
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336 |
_atext _btxt _2rdacontent |
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337 |
_acomputer _bc _2rdamedia |
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338 |
_aonline resource _bcr _2rdacarrier |
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347 |
_atext file _bPDF _2rda |
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490 | 1 |
_aMicrosystems and Nanosystems, _x2198-0071 |
|
505 | 0 | _aIntroduction -- Overview of Microsystems Manufacturing -- Process Variations in Microsystems Processing Steps -- Microsystems Metrology Methods and Associated Errors -- Process Integration and Variations in Material Properties -- Device Parameter Variations in Microsystems Manufacturing -- Quality Assurance and Control Methods Used in Microsystems Manufacturing -- Design Methods for Handling Process Variations -- Future Methods for Improved Microsystems Manufacturing Process Variations. | |
520 | _aThis book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level. Examines and explains the basic processing steps used in MEMS fabrication; Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case studies; Reviews future methods that may provide for improved process variations. | ||
650 | 0 |
_aMicrotechnology. _928219 |
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650 | 0 |
_aMicroelectromechanical systems. _96063 |
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650 | 0 |
_aManufactures. _931642 |
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650 | 0 |
_aNanotechnology. _94707 |
|
650 | 0 |
_aElectronic circuits. _919581 |
|
650 | 1 | 4 |
_aMicrosystems and MEMS. _935197 |
650 | 2 | 4 |
_aMachines, Tools, Processes. _931645 |
650 | 2 | 4 |
_aNanotechnology. _94707 |
650 | 2 | 4 |
_aElectronic Circuits and Systems. _935198 |
710 | 2 |
_aSpringerLink (Online service) _935199 |
|
773 | 0 | _tSpringer Nature eBook | |
776 | 0 | 8 |
_iPrinted edition: _z9783030405588 |
776 | 0 | 8 |
_iPrinted edition: _z9783030405595 |
830 | 0 |
_aMicrosystems and Nanosystems, _x2198-0071 _935200 |
|
856 | 4 | 0 | _uhttps://doi.org/10.1007/978-3-030-40560-1 |
912 | _aZDB-2-ENG | ||
912 | _aZDB-2-SXE | ||
942 | _cEBK | ||
999 |
_c75748 _d75748 |