000 00405nam a2200145Ia 4500
008 190711s9999 xx 000 0 und d
020 _a0849328381
082 _a621.381 L996
100 _aLYSHEVSKI, S.E
245 0 _aNANO AND MICROELECTROMECHANICAL SYSTEMS: FUNDAMENTALS OF NANO AND MICROENGINEERI
250 _a2
260 _aBoca Raton
_bCRC
_c2005
300 _a722p., 26X18Cms.
942 _cBK
_2DDC
999 _c31033
_d31033