000 | 00405nam a2200145Ia 4500 | ||
---|---|---|---|
008 | 190711s9999 xx 000 0 und d | ||
020 | _a0849328381 | ||
082 | _a621.381 L996 | ||
100 | _aLYSHEVSKI, S.E | ||
245 | 0 | _aNANO AND MICROELECTROMECHANICAL SYSTEMS: FUNDAMENTALS OF NANO AND MICROENGINEERI | |
250 | _a2 | ||
260 |
_aBoca Raton _bCRC _c2005 |
||
300 | _a722p., 26X18Cms. | ||
942 |
_cBK _2DDC |
||
999 |
_c31033 _d31033 |