000 | 00387nam a2200145Ia 4500 | ||
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008 | 190711s9999 xx 000 0 und d | ||
020 | _a1580535909 | ||
082 | _a621.381 M257 | ||
100 | _aMALUF, N. | ||
245 | 0 | _aINTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS ENGINEERING | |
250 | _a2 | ||
260 |
_aNORWOOD _bArtech House _c2004 |
||
300 | _axvi+282p.,26X18Cms. | ||
942 |
_cBK _2DDC |
||
999 |
_c30425 _d30425 |