000 | 00337nam a2200133Ia 4500 | ||
---|---|---|---|
008 | 190711s9999 xx 000 0 und d | ||
020 | _a1584883065 | ||
082 | _a621.31 P381 | ||
100 | _aPELESKO, J.A | ||
245 | 0 | _aMODELING MEMS AND NEMS | |
260 |
_aLONDON _bChapman & Hall _c2003 |
||
300 | _axxiii+357p.,24X16Cms | ||
942 |
_cBK _2DDC |
||
999 |
_c30210 _d30210 |