000 00337nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a1584883065
082 _a621.31 P381
100 _aPELESKO, J.A
245 0 _aMODELING MEMS AND NEMS
260 _aLONDON
_bChapman & Hall
_c2003
300 _axxiii+357p.,24X16Cms
942 _cBK
_2DDC
999 _c30210
_d30210