000 | 00378nam a2200133Ia 4500 | ||
---|---|---|---|
008 | 190711s9999 xx 000 0 und d | ||
020 | _a0125330139 | ||
082 | _a538.401 F825 | ||
100 | _aFRANCOMBE,M.H | ||
245 | 0 | _aPHYSICS OF THIN FILMS: ADVANCES IN RESEARCH AND DEVELOPMENT VOL.18: PLASMA SOURC | |
260 |
_aNEW YORK _bACADEMIC _c1987 |
||
300 | _a23X16 | ||
942 |
_cBK _2DDC |
||
999 |
_c25454 _d25454 |