000 00316nam a2200121Ia 4500
008 190711s9999 xx 000 0 und d
082 _a621.38152 G532
100 _aGISE.P
245 0 _aMODERN SEMICONDUCTOR FABRICATION TECHNOLOGY
260 _aNew Jersey
_bPrentice Hall
_c1986
300 _a24X18
942 _cBK
_2DDC
999 _c21810
_d21810