DOERING,R. <br/><br/>
HANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY 

 - 2 
 - Boca Raton  CRC  2008 
 - 1600p.,26x18Cms. 
<br/><br/><label>ISBN: </label>1-57444-675-4 
<br/><br/><label>Dewey Class. No.: </label>621.38152 D652