Roy, Sunipa, <br/><br/>
MEMS and nanotechnology for gas sensors / 
Sunipa Roy, Chandan Kumar Sarkar. 
 - 1 online resource 
<br/><br/>section 1. Fabrication procedure -- section 2. Sensor applications. 
<br/><br/><label>ISBN: </label>9781315214351 9781351821551 9781498700139 
<br/><br/><label>Standard No.: </label>10.1201/b18928   doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Gas detectors.<br/>Microelectromechanical systems.<br/>Detectors--Design and construction.<br/>Nanostructured materials.
<br/><br/><label>LC Class. No.: </label>TP754  / .R69 2016 
<br/><br/><label>Dewey Class. No.: </label>681.2  / R888