Micro- and nano-scale sensors and transducers /
Ezzat G. Bakhoum.
- 1 online resource
1. Pressure sensors -- 2. Motion and acceleration sensors -- 3. Gas and smoke sensors -- 4. Moisture sensors -- 5. Optoelectronic and photonic sensors -- 6. Biological, chemical, and lab on a chip sensors -- 7. Electric, magnetic, and RF/microwave sensors -- 8. Integrated sensor/actuator units and special purpose sensors.