Hsu,Tai Ran <br/><br/>
MEMS &Microsystems  Design and Manufacture  

 - New Delhi  Tata McGraw Hill  2010 
 - p.436 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label> Microsystem Design   Scaling laws in Miniaturization 
<br/><br/><label>Dewey Class. No.: </label>621.381 H973