Varadan, V, K. Vinoy,K, J. Jose, K, A. <br/><br/>
R.F MEMS  and Their Applications. 

 - Hoboken  Wiley  2003 
 - xiii+394p.,23x16Cms. 
<br/><br/><label>ISBN: </label>047084308X 
<br/><br/><label>Dewey Class. No.: </label>621.38413 V287