BALTES, H. & OTHERS Edrs. <br/><br/>
ENABLING TECHNOLOGY FOR MEMS AND NANO DEVICES -VOL .1: ADVANCED MICRO AND NANO S 

 - Weinheim  Wiley  2004 
 - xii+427p., 24X17Cms. 
<br/><br/><label>ISBN: </label>352730746X 
<br/><br/><label>Dewey Class. No.: </label>621.38175 B196