MALUF, N. <br/><br/>
INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS ENGINEERING 

 - 2 
 - NORWOOD  Artech House  2004 
 - xvi+282p.,26X18Cms. 
<br/><br/><label>ISBN: </label>1580535909 
<br/><br/><label>Dewey Class. No.: </label>621.381 M257