SESHAN, K. <br/><br/>
HANDBOOK OF THIN- FILM DEPOSITION PROCESSES AND TECHNIQUES:PRINCIPLES,METHODS,EQ 

 - 2 
 - NEW YORK  Noyes Data Corp  2002 
 - xxviii+629p.,23x15Cm 
<br/><br/><label>ISBN: </label>0815514425 
<br/><br/><label>Dewey Class. No.: </label>621.38172 S493