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NANOPARTICLE ENGINEERING OF CHEMICAL-MECHANICAL PLANARIZATION: FABRICATION OF NE

By: PAIK, U.
Material type: materialTypeLabelBookPublisher: Boca Raton CRC 2009Description: xiii+191p.,24x16Cms.ISBN: 978142005911.DDC classification: 620.5 P142
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620.5 P142 (Browse shelf) Available 091188

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