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ENABLING TECHNOLOGY FOR MEMS AND NANO DEVICES -VOL .1: ADVANCED MICRO AND NANO S

By: BALTES, H. & OTHERS Edrs.
Material type: materialTypeLabelBookPublisher: Weinheim Wiley 2004Description: xii+427p., 24X17Cms.ISBN: 352730746X.DDC classification: 621.38175 B196
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