Nanopositioning Technologies (Record no. 80926)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 03522nam a22006015i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 978-3-319-23853-1 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220801222558.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 151222s2016 sz | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9783319238531 |
| -- | 978-3-319-23853-1 |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 621.381 |
| 245 10 - TITLE STATEMENT | |
| Title | Nanopositioning Technologies |
| Sub Title | Fundamentals and Applications / |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 1st ed. 2016. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | VI, 409 p. 279 illus., 203 illus. in color. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | 1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Ru, Changhai. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Liu, Xinyu. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Sun, Yu. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://doi.org/10.1007/978-3-319-23853-1 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Cham : |
| -- | Springer International Publishing : |
| -- | Imprint: Springer, |
| -- | 2016. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 347 ## - | |
| -- | text file |
| -- | |
| -- | rda |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microtechnology. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microelectromechanical systems. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Electronics. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Control engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Robotics. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Automation. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Engineering design. |
| 650 14 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microsystems and MEMS. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Electronics and Microelectronics, Instrumentation. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Control, Robotics, Automation. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Engineering Design. |
| 700 1# - AUTHOR 2 | |
| -- | (orcid)0000-0001-7895-0741 |
| -- | https://orcid.org/0000-0001-7895-0741 |
| 912 ## - | |
| -- | ZDB-2-ENG |
| 912 ## - | |
| -- | ZDB-2-SXE |
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