METAL IMPURITIES IN SILICON-DEVICE FABRICATION (Record no. 26327)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00338nam a2200133Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 190711s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 3540583173 |
| 082 ## - CLASSIFICATION NUMBER | |
| Call Number | 621.38152 G736 |
| 100 ## - AUTHOR NAME | |
| Author | GRAFF,K |
| 245 #0 - TITLE STATEMENT | |
| Title | METAL IMPURITIES IN SILICON-DEVICE FABRICATION |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | BERLIN |
| Publisher | Springer |
| Year of publication | 1995 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 24X16 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) | |
| -- | DDC |
| Withdrawn status | Lost status | Circulation Status | Permanent Location | Current Location | Entry Date | Cost, normal purchase price | Full call number | Accession Number | Koha item type |
|---|---|---|---|---|---|---|---|---|---|
| | | | CENTRAL LIBRARY | CENTRAL LIBRARY | 1999-01-23 | 560.60 | 621.38152 G736 | 060638 | Books |