Roy, Sunipa,
MEMS and nanotechnology for gas sensors / Sunipa Roy, Chandan Kumar Sarkar. - 1 online resource
section 1. Fabrication procedure -- section 2. Sensor applications.
9781315214351 9781351821551 9781498700139
10.1201/b18928 doi
Gas detectors.
Microelectromechanical systems.
Detectors--Design and construction.
Nanostructured materials.
TP754 / .R69 2016
681.2 / R888
MEMS and nanotechnology for gas sensors / Sunipa Roy, Chandan Kumar Sarkar. - 1 online resource
section 1. Fabrication procedure -- section 2. Sensor applications.
9781315214351 9781351821551 9781498700139
10.1201/b18928 doi
Gas detectors.
Microelectromechanical systems.
Detectors--Design and construction.
Nanostructured materials.
TP754 / .R69 2016
681.2 / R888