Bakhoum, Ezzat G., 1963,
Micro- and nano-scale sensors and transducers / Ezzat G. Bakhoum. - 1 online resource
1. Pressure sensors -- 2. Motion and acceleration sensors -- 3. Gas and smoke sensors -- 4. Moisture sensors -- 5. Optoelectronic and photonic sensors -- 6. Biological, chemical, and lab on a chip sensors -- 7. Electric, magnetic, and RF/microwave sensors -- 8. Integrated sensor/actuator units and special purpose sensors.
9780429170492
10.1201/b18301 doi
Microelectromechanical systems.
TK7875 / .M53 2015
621.381 / B168
Micro- and nano-scale sensors and transducers / Ezzat G. Bakhoum. - 1 online resource
1. Pressure sensors -- 2. Motion and acceleration sensors -- 3. Gas and smoke sensors -- 4. Moisture sensors -- 5. Optoelectronic and photonic sensors -- 6. Biological, chemical, and lab on a chip sensors -- 7. Electric, magnetic, and RF/microwave sensors -- 8. Integrated sensor/actuator units and special purpose sensors.
9780429170492
10.1201/b18301 doi
Microelectromechanical systems.
TK7875 / .M53 2015
621.381 / B168